摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a method of producing a protective layer-joined body obtained by stacking and joining a protective layer for protection from use environment or working environment and an unprotected layer, and to provide a method of producing parts obtained by using the protective layer-joined body. <P>SOLUTION: The protective layer-joined body is obtained by stacking a protective layer 28 and an unprotected layer 22. In the method of producing the protective layer-joined body 10, each of the faces to be joined in the protective layer 28 and the unprotected layer 22 is subjected to activation treatment to remove unnecessary matter layers, thereafter, the faces to be joined are abutted and piled on each other so as to be confronted, and stack joining is performed to produce the protective layer-joined body 10. The protective layer-joined body 10 is stacked on a support 26 so as to be a stacked material 12, and the support 26 is subjected to etching working, so that an opening joined material 30 is produced, and it is made into a separation membrane part. Alternatively, it is stacked on a mesh plate 34 or a base 36, and is applied, e.g., to a hydrogen separation device as a separation membrane unit 32. <P>COPYRIGHT: (C)2004,JPO</p> |