| 摘要 |
PROBLEM TO BE SOLVED: To provide a technique for supressing impurities segregation, when a laser beam is irradiated to reform crystallization or crystallizability of a semiconductor sheet. SOLUTION: This invention is for irradiation of a laser beam, while giving supersonic vibrations with the periphery of a substrate being held, when the laser beam is irradiated to a semiconductor sheet formed on the substrate. The substrate, on which the semiconductor sheet is formed, is held on a stage where a hole is provided, and a gas is blown out of the hole to make the substrate levitate and irradiate with the laser beam, while giving supersonic vibrations with the periphery of the substrate being held, thus giving the supersonic vibration more efficiently. COPYRIGHT: (C)2004,JPO
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