| 摘要 |
PROBLEM TO BE SOLVED: To provide a semiconductor wafer inspection device whose constitution can be simplified and which can shorten the inspection process time. SOLUTION: This semiconductor wafer inspection device is equipped with a holder which holds a wafer, an aligner unit which obtains positioning data about a wafer by detecting a notch of the wafer held by the holder and detecting the center of the wafer, an observation means which has a microscope for magnifying a minute pattern on the wafer for observation and is provided at a position where the user can observe the wafer held by the holder of the above aligner unit, and a shifting means which shifts the above holder in XY direction relatively to the above observation means. This inspects the minute pattern in an expected position, based on the positioning data about the wafer. COPYRIGHT: (C)2004,JPO |
