发明名称 POLYVINYLALCOHOL-BASED PHOTOSENSITIVE RESIN
摘要 <P>PROBLEM TO BE SOLVED: To provide an etching-durable photosensitive resin composition which can be exposed for patterning with a small quantity of exposure light, which prevents misalignment of the pattern, which has excellent stripping property without leaving an unnecessary resin, and which can prevents a metal plate from rust. <P>SOLUTION: The etching-durable photosensitive resin to be used for the photoetching process of a metal plate comprises: (A) a polyvinyl alcohol resin having 65 to 98 mol% saponification degree and 4 to 46 (mPa s) viscosity of a 4 mass% aqueous solution at 20&deg;C; (B) a carboxyl group-containing water-soluble polymer having <20,000 (mPa s) viscosity of a 4 mass% aqueous solution at 20&deg;C; and (C) an alkali bichromate photosensitivity imparting agent. <P>COPYRIGHT: (C)2004,JPO
申请公布号 JP2004177581(A) 申请公布日期 2004.06.24
申请号 JP20020342386 申请日期 2002.11.26
申请人 RAIZU CHEMICAL RESEARCH:KK;JAPAN VAM & POVAL CO LTD 发明人 NOBORIO KAZUHIKO;MATSUOKA TOSHIFUMI
分类号 G03F7/04;G03F7/033;H01L21/027 主分类号 G03F7/04
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