发明名称 METHOD OF SEALING WITH RESIN, METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE, AND RESIN MATERIAL
摘要 <p><P>PROBLEM TO BE SOLVED: To reduce troubles, such as voids, wire deformations and the like, and to use resin materials effectively when a chip mounted on a board is sealed up with resin. <P>SOLUTION: A board 14 is mounted on a board placing part 11 when a lower mold 1 and an upper mold 2 are kept open, a resin material 4 which is prepared conforming to the dimensions/outlines of a cavity 5 is provided on the molding surface of the cavity 5. The resin materials 4 are heated into molten resin 17, and the upper mold 2 is made to descend to carry out mold clamping as the space between the lower mold 1 and the upper mold 2 is depressurized through a gas flow path 7, whereby a chip 15 and wires 16 are dipped into the molten resin 17. Furthermore, the molten resin 17 is turned to cured resin, a mold is formed of the board 14 and the cured resin, the lower mold 1 and the upper mold 2 are opened, and a molded body is taken out. By this setup, the molten resin 17 flows uniformly in the depthwise direction of the cavity 5 in a short time, so that troubles, such as voids, deformation of the wires 16 and the like, can be prevented. <P>COPYRIGHT: (C)2004,JPO</p>
申请公布号 JP2004179284(A) 申请公布日期 2004.06.24
申请号 JP20020341965 申请日期 2002.11.26
申请人 TOWA CORP;FUJITSU LTD 发明人 URAGAMI HIROSHI;NAKAGAWA TAKERU;FUJINO KINYA;TAKASE SHINJI;TOKUYAMA HIDEKI;MEGURO KOICHI;NISHINO TORU;HAYASAKA NOBORU
分类号 H01L23/02;H01L21/56;(IPC1-7):H01L21/56 主分类号 H01L23/02
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