发明名称 METHOD OF PRODUCING AN N-TYPE DIAMOND WITH HIGH ELECTRICAL CONDUCTIVITY
摘要 The invention relates to a method of producing an n-type diamond. The inventive method comprises an n-doping stage during which a donor species is vacuum diffused in a diamond that was initially doped with an acceptor (12), in order to form donor groups containing the donor species, at a temperature that is less than or equal to the dissociation temperature of the complexes formed between the acceptor and the donor species.
申请公布号 WO2004053960(A1) 申请公布日期 2004.06.24
申请号 WO2003FR03592 申请日期 2003.12.04
申请人 CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIQUE - CNRS;UNIVERSITE DE VERSAILLES ST-QUENTIN EN YVELINES;CHEVALLIER, JACQUES, PAUL, MARIE;TEUKAM, ZEPHIRIN, SYMPLICE;BALLUTAUD, DOMINIQUE 发明人 CHEVALLIER, JACQUES, PAUL, MARIE;TEUKAM, ZEPHIRIN, SYMPLICE;BALLUTAUD, DOMINIQUE
分类号 C30B31/00;C30B31/06;H01L21/04;H01L21/205;H01L21/223 主分类号 C30B31/00
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