发明名称 |
Multi-axis compound lens, beam system making use of the compound lens, and method using the compound lens |
摘要 |
The invention provides an optical system for a charged particle multi-beam system. The optical system comprises an electrostatic lens component and a magnetic lens component. The components are used to focus a plurality of charged particle beams in a separate opening for each of at least a plurality a charged particle beams traveling through the optical system. <IMAGE> |
申请公布号 |
EP1432008(A1) |
申请公布日期 |
2004.06.23 |
申请号 |
EP20020028345 |
申请日期 |
2002.12.17 |
申请人 |
ICT INTEGRATED CIRCUIT TESTINGGESELLSCHAFT FUER HALBLEITERPRUEFTECHNIK MBH |
发明人 |
FROSIEN, JUERGEN;ADAMEC, PAVEL |
分类号 |
H01J37/145;H01J37/317 |
主分类号 |
H01J37/145 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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