Projection optical system,申请号EP19980106068-传众专利搜索

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发明名称	Projection optical system
摘要
申请公布号	EP0869382(B1)	申请公布日期	2004.06.23
申请号	EP19980106068	申请日期	1998.04.02
申请人	NIKON CORPORATION	发明人	KUDO, SHINTARO
分类号	G02B9/12;G02B13/24;G02B13/00;G03F7/20;H01L21/027;(IPC1-7):G02B13/00	主分类号	G02B9/12
代理机构		代理人
主权项
地址

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