| 摘要 |
FIELD: facilities ensuring microdispacements along three coordinates, for instance, in the capacity of scanner in sounding microscopy. ^ SUBSTANCE: invention is aimed at increased precision of displacement. Displacement aid incorporates base on which unit moving along one coordinate Z is anchored with one end, on its other end movement unit is arranged by means of linking member for movement along two mutually perpendicular coordinates X, Y in plane perpendicular to coordinate Z. Displacement aid is fitted with guides arranged along coordinate Z which are matched to base and linking member along its edges along axis Z. Stiffness of linking member along coordinate Z exceeds stiffness of aid moving along one coordinate. It is possible that guides can b arranged along coordinate Z in the form of springy members. It is also advantageous that springy members can be implemented in the form of two flat springs fixed along periphery of base and with central parts on linking member so that their planes are perpendicular to axis Z. It is also possible that springy guides are hinges to base and linking member. Linking member can be interference fitted along axis Z with reference to base. In case of utilization of uncompressed media it will be advantageous to make two holes as minimum in two flat springs. There exists another variant according to which flat springs are perforated so that their springy fragments include Z-shaped members working for bending. ^ EFFECT: increased precision of displacement. ^ 8 cl, 9 dwg |
