| 摘要 |
PROBLEM TO BE SOLVED: To solve the problem that a silicon substrate in a face orientation of [110] requires a complicated process or a dedicated facility for using an alkaline aqueous solution, the designing is limited by the face orientation, and the precise controlling of the dimension is hard. SOLUTION: In a fluid passage plate 1 consisting of a silicon substrate in a face orientation of [100], fluid passage sections are formed thereon by a dry etching. Each of the fluid passage sections of a communication pipe 5 for flowing of a liquid, a pressurizing liquid chamber 6, a fluid resistor section 7, and an ink flow-in section 10, is formed in a shape not having a tapered face formed by the silicon face orientation. COPYRIGHT: (C)2004,JPO
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