MANUFACTURING METHOD AND DEVICE FOR METAL ATOM MICRO-STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide a manufacturing method and device for a metal atom micro-structure capable of fabricating a micro-electrode of nanometer scale using an interatomic force microscope. SOLUTION: The manufacturing method and device for the metal atom micro-structure is configured so that a cantilever 1 fitted with a solid electrolyte 3 having ion conductiveness is installed on a conductive base board 4, and movable metal ions in the solid electrolyte 3 are moved by giving a negative impression voltage to between the solid electrolyte 3 and the conductive base board 4, and metal atoms are deposited on the base board 4, and thereon a micro-structure 5 is formed. COPYRIGHT: (C)2004,JPO