| 摘要 |
PROBLEM TO BE SOLVED: To provide a gas component measuring method and device for measuring a component rate of the mixture gas containing a plurality of chemical species. SOLUTION: The mixture gas stored in a storage container 10 is irradiated with the laser beam from a laser 12 through an optical window 11. Chemical species contained in the mixture gas radiates the Raman scattering light peculiar to the chemical species, and the intensity of this Raman scattering light is in proportion to the concentration of the chemical species and the pressure of the mixture gas. Ratio of the Raman scattering light intensity of other chemical species in relation to the Raman scattering light intensity of a specified chemical species is computed to decide a concentration ratio independently of pressure. COPYRIGHT: (C)2004,JPO
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