| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a fluid transport system capable of preventing deterioration of characteristics. <P>SOLUTION: In this fluid transport system, chambers 20s and 20t of a plurality of micropumps are serially disposed. In each micropump, the chamber of the micropump has first opening parts 24s, 22t, and 24x, and second opening parts 22s, 22t, and 22x. When pressure in the chambers 20s and 20t is increased, passage resistance change ratio of the first opening parts 24s and 24x is larger than passage resistance change ratio of the second opening parts 22s and 22x. Between the micropumps adjoining each other, they are communicated with each other by the first opening part 24x that is common, with the second opening parts 22s and 22t positioned on the opposite side respectively. Otherwise, they are communicated with each other by the second opening part 22x that is common, with the first opening parts 24s and 24t positioned on the opposite side respectively. <P>COPYRIGHT: (C)2004,JPO</p> |
