LIQUID FEED DEVICE, LIQUID DISCHARGE DEVICE, LIQUID DROP DELIVERY DEVICE, ELECTRO-OPTICAL DEVICE, METHOD FOR MANUFACTURING ELECTRO-OPTICAL DEVICE AND ELECTRONIC UNIT

摘要

PROBLEM TO BE SOLVED: To provide a liquid feed device and a liquid discharge device realizing compatibility of large sizing and easiness of a tank exchange work and continuing operation of a liquid drop delivery device even in the exchange of the tank; the liquid drop delivery device provided with the liquid feed device and the liquid discharge device; an electro-optical device manufactured by the liquid drop delivery device; a method for manufacturing the electro-optical device using the liquid drop delivery device; and an electronic instrument provided with the electro-optical device.

SOLUTION: The delivery liquid feed device 4 has a first delivery liquid tank 401 and a second delivery liquid tank 402 for storing the liquid fed to a liquid drop delivery head; a flow out pipe 403 connected to the first delivery liquid tank 401; a flow out pipe 404 connected to the second delivery liquid tank 402; a three-way valve 405 connected with a liquid feed pipe 411 to the liquid drop delivery head and the flow out pipes 403 and 404. The delivery liquid is selectively fed to the liquid drop delivery head from the first delivery liquid tank 401 or the second delivery liquid tank 402 by switching of the three-way valve 405.

COPYRIGHT: (C)2004,JPO