| 发明名称 |
PHOTOCATALYST PURIFYING SYSTEM |
| 摘要 |
<p>A photocatalyst purifying system characterized by being provided with a photocatalyst and a light emitting diode for purifying a local space or an enclosed space for machining, transporting and storing a substrate being machined in a micromachining process. The photocatalyst purifying system is characterized by being provided with a photocatalyst produced by forming a photocatalyst film on a substrate, a light emitting diode for irradiating the photocatalyst with UV-rays, a photocatalyst unit case provided with a power supply section, and a reflector. Furthermore, the photocatalyst purifying system is characterized by having a corrugated cross-sectional shape, and the light emitting diode is characterized by being aligned with the wave crest of the photocatalyst having corrugated cross-section.</p> |
| 申请公布号 |
WO2004050218(A1) |
申请公布日期 |
2004.06.17 |
| 申请号 |
WO2002JP12680 |
申请日期 |
2002.12.03 |
| 申请人 |
DAINICHI SHOJI K. K.;HITACHI METALS LTD.;TOYODA GOSEI CO., LTD.;ISHIKAWA, TOSHIO;WADA, TAKEO;SAKAI, KAZUHIRO |
发明人 |
ISHIKAWA, TOSHIO;WADA, TAKEO;SAKAI, KAZUHIRO |
| 分类号 |
B01D53/88;B01J35/00;B01J37/02;H01L21/673;(IPC1-7):B01D53/86;B01J35/02;H01L21/68;B65D85/38;H01L21/02 |
主分类号 |
B01D53/88 |
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