| 摘要 |
PROBLEM TO BE SOLVED: To provide a two-dimensional test pattern suitable for a color confocal microscope system furnished with a function which automatically corrects the deviation of a confocal image and a color image and for the automatic adjustment of the system. SOLUTION: The color confocal microscope system 1 is provided with a function with which the surface of a specimen is scanned with light, the light reflected on the surface of the specimen is received with a light receiving element via a confocal optical system, such a confocal image as an ultra depth image available by processing received light information and a color image available by receiving light reflected on the surface of the specimen with a color image pick-up element via a non-confocal optical system which has a partially common optical axis with the confocal optical system are composed, thus a color confocal image is generated. Further, the system is provided with scanning adjustment means from 75 through 79 which automatically adjust a resonant scanner 14a and a galvanoscanner 14b for scanning the surface of the specimen with light so that the two-dimensional pattern of the confocal image coincides with the two-dimensional pattern of the color image when the two-dimensional test patter is picked up. COPYRIGHT: (C)2004,JPO
|
