| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a spin chuck capable of forming a resin stagnation part formed during injecting a resin into a mold on the central axial line of a molded article, and suppressing generation of inferiority of molding derived from eccentricity/deformation caused by slug, the resin stagnation part and ununiform orientation of the resin on a wefer adsorbed face, in the spin chuck of a center gate system consisting of a combination of the spin chuck made of the resin and an insert fitment. <P>SOLUTION: In the method for manufacturing the spin chuck of the center gate system consisting of a combination of the spin chuck made of the resin and the insert fitment embedded on the central axial line of the spin chuck, the resin is filled in a round condition by providing a resin retention part at a position just below an injecting gate of the insert fitment. <P>COPYRIGHT: (C)2004,JPO |
