Integriertes Gassteuergerät

摘要

A plurality of connecting blocks are mounted on a base plate. Each block has a base body and a vertical cylindrical portion formed on the base body, and has a vertical hole. The base body has a horizontal hole opened at both sides thereof and communicated with the vertical hole in the cylindrical portion. A plurality of intermediate blocks, each having a fixed portion and a pair of horizontal cylindrical inserting portions formed on both sides of the fixed portion are mounted on the base plate. The intermediate block has a horizontal gas passage having a pair of openings opened at upper surfaces on both sides of the fixed portion. The horizontal hole of each of the connecting blocks is engaged with the corresponding inserting portion of the intermediate block. A cylindrical connecting member having an inlet gas passage and an outlet gas passage is secured in the vertical hole of each connecting block. The outlet gas passage of the inlet side connecting member is communicated with the inlet gas passage of the outlet side connecting member. A gas control unit is secured to the connecting member.