| 摘要 |
PROBLEM TO BE SOLVED: To improve read-out performance of a magnetoresistance sensor with respect to the manufacturing method of the magnetoresistance sensor having a spacer layer deposited and oxidized by multiple steps to improve its magnetic performance. SOLUTION: A magnetoresistance sensor 50 is manufactured by preparing a substrate structure 80, depositing a magnetic fixation structure 86 onto the substrate structure 80, depositing a copper oxide spacer layer 98 onto the stably magnetized structure 86, and depositing a sensing structure 104 onto the copper oxide spacer layer 98 in piles. The deposition of the copper oxide spacer layer 98 includes the deposition of a primary copper base layer 100, the oxidation of the primary copper base layer, the deposition of a secondary copper base layer 102, and the oxidation of the secondary copper base layer. Further, depositing and oxidation steps are used as required. COPYRIGHT: (C)2004,JPO |
