| 摘要 |
PROBLEM TO BE SOLVED: To achieve a wafer prober enabling precise measurement even in inspection under high-and low-temperature environments. SOLUTION: The wafer prober comprises: a wafer chuck 16 capable of heating and cooling a wafer 15; a movement mechanism 17 for moving the wafer chuck; a travel amount detection mechanism that has scales 31, 32 and detects the travel amount of the movement mechanism; and a case 20. Additionally, the wafer prober includes a temperature detector provided in the wafer chuck and the scales; a shutter 43 that is provided in the case and can be opened and closed; a fan 42 for ventilating the inside of the case; and a control mechanism 46 for controlling the shutter and the fan according to temperature in the wafer chuck and the scales detected by the temperature detector. COPYRIGHT: (C)2004,JPO
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