METHOD AND APPARATUS FOR MEASURING THREE-DIMENSIONAL SHAPE

摘要

PROBLEM TO BE SOLVED: To provide an apparatus for measuring a three-dimensional shape for achieving compactness by shortening the depth of an actual apparatus while maintaining an optical sufficient distance. SOLUTION: The three-dimensional shape measuring apparatus is provided with a plurality of illumination means at the same distance from an object to be measured for illuminating diffused light having different angles of diffusion; a photographing means for photographing the object to be measured illuminated by each illumination means; a recording means for recording image data photographed by the photographing means; and a computing means for computing its three-dimensional shape through the use of the image data recorded in the recording means. The diffused light irradiated from each illumination means is synthesized by a half mirror into one beam on the optical axis to irradiate the object to be measured. COPYRIGHT: (C)2004,JPO