发明名称 |
CERIUM-BASED ABRASIVE MATERIAL SLURRY AND METHOD FOR PRODUCING CERIUM-BASED ABRASIVE MATERIAL SLURRY |
摘要 |
The present invention provides a cerium-based abrasive slurry particles including a cerium-based abrasive particle of no less than 95% by weight of total rare earth oxides (TREO) , in which the cerium-based abrasive particle has less than 3% by weight of fluorine content of TREO, and a particle size distribution determined by a laser diffraction method is within a predetermined range. And adhesion property is further improved by setting this fluorine content in 0.005 to 0.5% by weight of TREO. |
申请公布号 |
EP1428862(A1) |
申请公布日期 |
2004.06.16 |
申请号 |
EP20020760826 |
申请日期 |
2002.09.12 |
申请人 |
MITSUI MINING & SMELTING CO., LTD. |
发明人 |
UCHINO, YOSHITSUGU;USHIYAMA, KAZUYA |
分类号 |
B24B37/00;C09G1/02;C09K3/14;H01L21/304;(IPC1-7):C09K3/14;B24B57/02 |
主分类号 |
B24B37/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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