发明名称 Process and device for lacquering or coating a substrate
摘要 The appts. includes a container (10) from which a substrate (29) is covered with liq. (11) through a capillary tube (13) ending in a nozzle (40). A coating (31) is typically formed up to 5 to 50 microns thick in the wet condition. The structure (12) enclosing the capillary is mounted on a vertical rod (15) movable within a bellows (17) by e.g. a hydraulic or pneumatic jack (44). Upon completion of a coating, the tube is lowered through the aperture (48) in the top of the container, until the nozzle is below the surface of the liquid. The aperture is closed (46) by translation of a cover plate (19).
申请公布号 EP1210984(B1) 申请公布日期 2004.06.16
申请号 EP20020003487 申请日期 1995.03.11
申请人 STEAG HAMATECH AG 发明人 APPICH, KARL;STUMMER, MANFRED
分类号 B05D1/26;B05C5/02;B05C9/02;B05C11/105;H01L21/00 主分类号 B05D1/26
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