发明名称 Method for manufacturing ceramic substrate and non-fired ceramic substrate
摘要 <p>The present invention provides a method for readily and efficiently manufacturing a ceramic substrate (10) having an excellent dimensional accuracy and small degree of warp comprising the steps of: preparing a non-sintered multilayer ceramic body (1) formed by laminating ceramic layers and conductor layers; forming a multilayer ceramic body (1) with constraint layers (7a, 7b) by adhering a first constraint layer (7a) and a second constraint layer (7b) on one major surface (6a) and the other major surface (6b), respectively, of the multilayer ceramic body (1), the first and second constraint layers (7a, 7b) being prepared by dispersing a ceramic powder that is not sintered under the sintering condition of the multilayer ceramic body; firing the multilayer ceramic body (1) with the constraint layers (7a, 7b) under the firing condition of the multilayer ceramic body (1); and removing the first constraint layer (7a) and the second constraint layer (7b) after sintering the multilayer ceramic body (1), wherein the thickness (T1) of the first constraint layer (7a) is made to be larger than the thickness (T2) of the second constraint layer (7b), and the first constraint layer (7a) is provided on one major surface (6a) that is more largely contracted by firing. <IMAGE></p>
申请公布号 EP1061569(B1) 申请公布日期 2004.06.16
申请号 EP20000112712 申请日期 2000.06.15
申请人 MURATA MANUFACTURING CO., LTD. 发明人 SAKAMOTO, SADAAKI;SUNAHARA, HIROFUMI
分类号 H05K3/46;C04B35/053;C04B35/111;C04B35/185;C04B35/486;C04B35/583;C04B35/634;H01L21/48;H01L23/15;H01L23/498;H05K1/03;H05K1/16;H05K1/18;(IPC1-7):H01L21/48 主分类号 H05K3/46
代理机构 代理人
主权项
地址