STATIC ELECTRICITY PREVENTING STRUCTURE AND METHOD FOR MANUFACTURING THE SAME

摘要

PURPOSE: A static electricity preventing structure and a method for manufacturing the same are provided to achieve improved stability of electrostatic discharge by using a carbon nanotube as a static electricity preventing member. CONSTITUTION: A static electricity preventing structure comprises a static electricity preventing unit(100) interposed between an input pad(10) and an internal circuit(20). The static electricity preventing unit discharges a static electricity to a power voltage apply unit(VDD) or a ground(GND) when the static electricity is applied. The static electricity preventing unit is a field emission element including a carbon nanotube(130) arranged on a semiconductor substrate(110). The field emission element includes the semiconductor substrate; a cathode electrode(115) formed on the semiconductor substrate; an anode electrode(132) opposed to the cathode electrode; and the carbon nanotube formed on the cathode electrode, and which emits electrons when an electric field is formed between the cathode electrode and the anode electrode.