| 摘要 |
<p>An electric probe system comprising a hold mechanism (2) for holding a substrate (10) to be inspected, and a probe unit (3) positionable with respect to the hold mechanism (2), the probe unit (3) comprising a first probes group (5a) elastically contactable with a first pads group (11k) on the substrate (10) under a contact pressure in a predetermined range (2 z) within a first stroke change region (V1), a second probes group (5b) elastically contactable with a second pads group (11k) on the substrate (10) under a contact pressure in the predetermined range (2 z) within a second stroke change region (V2) different from the first stroke change region (V1), and a probe holder (3d) having the first and second probes groups (5a, 5b) set therein.</p> |
