| 摘要 |
The present invention is directed to a capacitor apparatus of the capacity variable type. This capacitor apparatus is manufactured by Micro Electro-Mechanical System technology, and comprises an insulating substrate ( 2 ) in which at least two capacitor electrodes ( 3 ), ( 4 ) are formed on one surface ( 2 a) in the state where they are insulated each other, an actuator ( 5 ) formed by insulating material and having an external shape to bridge over the respective capacitor electrodes ( 3 ), ( 4 ), the actuator ( 5 ) being such that a conductor which respectively constitutes capacitors between the conductor ( 6 ) and these capacitor electrodes ( 3 ), ( 4 ), and drive means ( 7 ) for allowing this actuator ( 5 ) to undergo an operation to come into contact with one principal surface ( 2 a) of the insulating substrate ( 2 ) or to become away therefrom.
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