发明名称 APPARATUS FOR MODULATING A LIGHT BEAM
摘要 A modulation spectroscopy system (1) has an acousto-optic modulator (5) providing a pump beam onto a sample. The modulator receives a light beam from a source (4) and diffracts it to provide an output which is the first order beam, the zeroth order or undeflected beam being terminated and the 2nd and higher orders being negligible and terminated also. The modulator is driven alternately by two drive frequencies at a modulation or toggle frequency. The first order output is at one angle for a first drive frequency and at another angle for the other drive frequency. The duty cycle of alternating between the different drive frequencies sets the output beam position duty cycle for incidence at two different spots on the sample. Also, either or both beams may be position and/or intensity varied by control of the modulator drive frequencies and their amplitudes.
申请公布号 WO2004048945(A1) 申请公布日期 2004.06.10
申请号 WO2003IE00158 申请日期 2003.11.27
申请人 OPTICAL METROLOGY PATENTS LIMITED;MURTAGH, MARTIN, EDWARD;KELLY, PATRICK, VINCENT 发明人 MURTAGH, MARTIN, EDWARD;KELLY, PATRICK, VINCENT
分类号 G01N21/17;G01N21/63 主分类号 G01N21/17
代理机构 代理人
主权项
地址