| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method of an electron injection property electrode capable of manufacturing the electron injection property electrode containing an alkaline metal and having high chemical stability while easily controlling the composition thereof, and a manufacturing method of an organic EL element. SOLUTION: A Li alloy 4 is used as a first Li deposition source 5 in a vacuum atmosphere, the Li evaporated from the first deposition source 5 is concentrated to a second Li deposition source 7 by heating the first deposition source 5 to the temperature at which only the Li is evaporated. The Li and a second metal are simultaneously evaporated by heating a second metal deposition source 10 to the temperature at which the second metal is evaporated, while heating the second Li deposition source 7 to the temperature at which the agglutinated Li is released, and the injection property electrode composed of an alloy thin film containing the Li on a film-formed substrate 12 is formed. COPYRIGHT: (C)2004,JPO
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