摘要 |
PROBLEM TO BE SOLVED: To provide an orientation film forming method by which a highly reliable orientation film can be stably formed with satisfactory productivity, to provide a liquid crystal panel, a liquid crystal projector and an electronic device. SOLUTION: The orientation film forming method has a base film forming step for forming a base film 31 having a plurality of inclined surfaces 31a which are parallel to each other and inclined based on the surface of a substrate 9 by forming a transparent film 30 on the substrate 9 and forming a plurality of grooves 40 parallel to each other in the transparent film 30, and an orientation film forming step for forming the orientation film 21 having the surface to which the shape of a plurality of the inclined surfaces 31a is transmitted and consisting of an inorganic material by film-depositing an inorganic material film on the base film 31 by a sputtering method. COPYRIGHT: (C)2004,JPO
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