| 摘要 |
PROBLEM TO BE SOLVED: To provide a substrate holding apparatus capable of easily acquiring with precision the information regarding a substrate and the shape (planarity) of a holding surface that holds the substrate. SOLUTION: A substrate holder PH holds a photosensitized substrate P, by placing it on a holding surface 1 that holds it. The substrate holder PH comprises a light-transmitting system 67, which is movable relative to a surface PS of the photosensitized substrate P and makes measurement light B irradiated, a light-receiving system 68 which detects a reflected light BB reflected on a rear surface PB facing the surface PS of the photosensitized substrate P, and a controller CONT that detects a contact information between the photosensitized substrate P and the holding surface 1, based on the light quantity of the reflected light BB received by the light-receiving system 68. COPYRIGHT: (C)2004,JPO |
