| 摘要 |
PROBLEM TO BE SOLVED: To manufacture a target without a practical problem using lanthanoid as a material. SOLUTION: The manufacturing method of the target of the X-ray apparatus comprises processes (P2, P3) of ramming down a mixture material of boride of lanthanoid such as LaB<SB>6</SB>, and a material with a higher coefficient of thermal conductivity than the boride of lanthanoid such as copper by putting it in a die, a process (P5) of heating the rammed-down mixture material in an isotropic pressurization state, and a process (P6) of processing the mixture material heated in the isotropic pressurization state in a shape of a target. If the die is set in a circular shape, a rotor target can be manufactured. Since a mixture of LaB<SB>6</SB>and copper is used, peel-off or damage of the surface layer of the target can be prevented for a long period of time as compared with the case of using an LaB<SB>6</SB>single body. COPYRIGHT: (C)2004,JPO
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