METHOD OF MEASURING THICKNESS OF AN OPAQUE COATING USING INFRARED ABSORBANCE

摘要

Amount of opaque coating on a substrate is determined. An infrared beam is transmitted into the opaque coating on the substrate. Infrared beams scattered by the opaque coating are collected and detected at a first wavelength and a second wavelength. Infrared energy IC1 and IC2 of the collected infrared beams at the first and second wavelengths, respectively, are compared with predetermined values of infrared energy IO1 and IO2 of collected infrared beams at the first and second wavelengths, respectively, that are scattered by a reference substrate without the opaque coating to determine absorbance values Al and A2 for the opaque coating at the first and second wavelengths, respectively. Absorbance values Al and A2 at the first and second wavelengths are given by equations Al = -log10(IC1/IO1) and A2 = -log10(IC2/1O2). A difference Al - A2 is correlated to an opaque coating amount.