DEVICE MANUFACTURING EQUIPMENT AND DEVICE MANUFACTURING METHOD, ELECTRONIC INSTRUMENT

摘要

PROBLEM TO BE SOLVED: To provide device manufacturing equipment which can manufacture a device with desired performance capable of preventing dot defects by detecting a nonaction nozzle without reducing the throughput in manufacturing the device with a liquid drop ejection method.

SOLUTION: The device manufacturing equipment IJ is provided with an ejection head 1 for ejecting a liquid containing a functional material, a stage apparatus 2 supporting a substrate P to which the liquid is ejected and capable of moving relatively to the ejection head 1, a transfer apparatus 3 for transferring the substrate P, a detector 30 for detecting ejection conditions of the liquid ejected through a ejection nozzle 11 formed on the ejection head 1, and a control device CONT for implementing the detection operation with the detector 30.

COPYRIGHT: (C)2004,JPO