发明名称 METHOD AND DEVICE FOR DETECTING CONTOUR, METHOD AND DEVICE FOR DETECTING POSITION, AND ALIGNER
摘要 PROBLEM TO BE SOLVED: To provide a method for precisely detecting a contour of an object to be detected. SOLUTION: In a step 127, a contour candidate point of the object to be detected is extracted from each pixel of image data IMD2. In a step 129, the contour of the object to be detected is approximated into a geometric function, on the basis of the contour candidate point. In a step 131, a reference position in the approximate geometric function is calculated. In a step 133, frequency distribution of the counter candidate points with respect to the distance from the reference position is prepared. In a step 135, the distance at the mode M in the frequency distribution is calculated. In a step 137, the contour candidate point at the distance near the mode M is extracted as the contour point of the object to be detected. Namely, the counter point having high possibility as the true contour point is extracted from the counter candidate points, using a statistical method. COPYRIGHT: (C)2004,JPO
申请公布号 JP2004163313(A) 申请公布日期 2004.06.10
申请号 JP20020330789 申请日期 2002.11.14
申请人 NIKON CORP 发明人 MIMURA MASABUMI;SUGIHARA TARO
分类号 G01B11/00;G01B21/00;G01B21/20;G03F9/00;H01L21/027;(IPC1-7):G01B21/20 主分类号 G01B11/00
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