发明名称 Multiple-gate transistor structure and method for fabricating
摘要 A multiple-gate transistor structure which includes a substrate, source and drain islands formed in a portion of the substrate, a fin formed of a semi-conducting material that has a top surface and two sidewall surfaces, a gate dielectric layer overlying the fin, and a gate electrode wrapping around the fin on the top surface and the two sidewall surfaces separating source and drain islands. In an alternate embodiment, a substrate that has a depression of an undercut or a notch in a top surface of the substrate is utilized.
申请公布号 US2004108523(A1) 申请公布日期 2004.06.10
申请号 US20020314249 申请日期 2002.12.06
申请人 CHEN HAO-YU;YEO YEE-CHIA;YANG FU-LIANG 发明人 CHEN HAO-YU;YEO YEE-CHIA;YANG FU-LIANG
分类号 H01L21/336;H01L29/423;H01L29/786;(IPC1-7):H01L27/10 主分类号 H01L21/336
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