| 摘要 |
PROBLEM TO BE SOLVED: To provide an electronic microscope system in which functionality of a beam splitter is offered. SOLUTION: The primary electron beams 11 from an electron source 51 are guided to a beam splitter 21 and guided to the object plane 7. The secondary electron beams 13 are guided toward the beam splitter 21, and only the charged particles of which kinetic energy is in a prescribed energy range are transmitted through magnetic pole components 29, 30, 31, 32 constituting an energy selection device 27. The beam splitter 21 includes at least one pair of magnetic poles of the energy selection device 27. The angle between the direction of the primary electron beams 11 after radiated from the electron source 51 and the direction of the primary electron beams 11 outgoing from the beam splitter 21 is made less than 80 degrees, in particular, less than 60 degrees. COPYRIGHT: (C)2004,JPO
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