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发明名称
PUMP CONTROLLER FOR PRECISION PUMPING APPARATUS
摘要
申请公布号
EP1133639(B1)
申请公布日期
2004.06.09
申请号
EP19990965911
申请日期
1999.11.23
申请人
MYKROLIS CORPORATION
发明人
ZAGAR, RAYMOND, A.;MCLOUGHLIN, ROBERT, F.
分类号
F04B7/00;F04B13/00;F04B43/02;F04B49/06;(IPC1-7):F04B13/00
主分类号
F04B7/00
代理机构
代理人
主权项
地址
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