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发明名称
Elektronische Vorrichtung und Methode zur Herstellung einer Membran dafür
摘要
申请公布号
DE69728976(D1)
申请公布日期
2004.06.09
申请号
DE1997628976
申请日期
1997.07.25
申请人
MOTOROLA SEMICONDUCTEURS S.A., TOULOUSE
发明人
GUILLEMET, JEAN-PAUL;COMBES, MYRIAM;ASTIE, STEPHEN;SCHEID, EMMANUEL
分类号
G01N27/12;H01L23/00;(IPC1-7):H01L23/00
主分类号
G01N27/12
代理机构
代理人
主权项
地址
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