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经营范围
发明名称
ELECTRON BEAM RESIST
摘要
申请公布号
EP1159649(B1)
申请公布日期
2004.06.09
申请号
EP19990962315
申请日期
1999.12.16
申请人
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY;THE UNIVERSITY OF BIRMINGHAM
发明人
PALMER, RICHARD EDWARD;ROBINSON, ALEXANDER PHILLIP;KANAYAMA, TOSHIHIKO;TADA, TETSUYA
分类号
G03F7/004;G03F7/038;G03F7/32;H01L21/027;(IPC1-7):G03F7/038
主分类号
G03F7/004
代理机构
代理人
主权项
地址
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