| 发明名称 |
Method and apparatus for separating composite member using fluid |
| 摘要 |
To separate a composite member consisting of a plurality of bonded members without destructing or damaging it, a fluid is jetted against the composite member from a nozzle to separate it into a plurality of members at a position different from a bonding position.
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| 申请公布号 |
US6746559(B2) |
申请公布日期 |
2004.06.08 |
| 申请号 |
US20020202022 |
申请日期 |
2002.07.25 |
| 申请人 |
CANON KABUSHIKI KAISHA |
发明人 |
OHMI KAZUAKI;YONEHARA TAKAO;SAKAGUCHI KIYOFUMI;YANAGITA KAZUTAKA |
| 分类号 |
H01L21/301;H01L21/00;H01L21/683;(IPC1-7):B32B35/00 |
主分类号 |
H01L21/301 |
| 代理机构 |
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代理人 |
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