| 摘要 |
PURPOSE: An actuator and a method for manufacturing the same are provided to facilitate implementation of interconnections on the actuator by adaptively selecting proper implementation places. CONSTITUTION: An actuator includes an insulating substrate(12), a pair of silicon arms(14), a piezoelectric member(20), and a first electrode(18). The silicon arms are doped with impurities and are connected to each of terminal surfaces of the insulating substrate, respectively. The piezoelectric member is formed on a surface facing a surface which is connected to the insulating substrate on the silicon arm. The first electrode(18) is formed on a surface facing a surface which faces the silicon arm in the piezoelectric member. A second electrode is formed on a surface where the piezoelectric member is formed in the silicon arm. The insulating substrate is composed of glass. The piezoelectric member is a single-layer piezoelectric film.
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