METHOD AND APPARATUS FOR REMOVING AIR BUBBLES ON SUBSTRATE BY ULTRASONIC WAVES

摘要

PURPOSE: An apparatus for removing air bubbles on a substrate by ultrasonic waves is provided to avoid an anti-reaction phenomenon caused by air bubbles by mounting a supersonic vibrator on a side surface of a wet reaction bath and by easily eliminating the air bubbles on the substrate by supersonic vibration delivered through a liquid medium. CONSTITUTION: The substrate(4) is located in the center of the wet reaction bath(3) in a direction vertical to the ground. The ultrasonic vibrator mounted on the side surface of the wet reaction bath faces the substrate. The ultrasonic vibrator vibrates at two or more different vibrating frequencies.