| 摘要 |
PURPOSE: A cleaning apparatus of a reaction tube of a diffusion furnace is provided to prevent the collision between a gas jetting nozzle and the inner portion of a reaction tube, and to uniformly jet nitrogen gas at the inside of the reaction tube by automatically transferring the gas jetting nozzle into the reaction tube and moving the nozzle to the horizontal direction in the reaction tube when jetting nitrogen gas. CONSTITUTION: A cleaning apparatus is provided with a gas jetting nozzle(600) installed at one end of a piston rod(510) for jetting nitrogen gas in order to dry the inside of a reaction tube after cleaning, and a pneumatic cylinder(500) installed at the inside of a main frame for transferring the gas jetting nozzle(600) through a nozzle gateway of a basket to the inner portion of the reaction tube by using piston movement. Preferably, the pneumatic cylinder(500) moves the gas jetting nozzle(600) to the horizontal direction at the inside of the reaction tube, while the gas jetting nozzle(600) jets nitrogen gas at the inside of the reaction tube.
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