发明名称 |
PREVENTION OF Ta2O5 MIM CAP SHORTING IN THE BEOL ANNEAL CYCLES |
摘要 |
The present invention provides a high-performance metal-insulator-metal (MIM) capacitor which contains a high-k dielectric, yet no substantial shorting of the MIM capacitor is observed. Specifically, shorting of the MIM capacitor is substantially prevented in the present invention by forming a passivation layer between the high-k dielectric layer and each of the capacitor"s electrodes. The inventive MIM capacitor includes a first conductor; a first passivation layer located atop the first conductor; a high-k dielectric layer located atop the first passivation layer; a second passivation layer located atop the high k dielectric layer; and a second conductor located atop the second passivation layer.
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申请公布号 |
US2004104420(A1) |
申请公布日期 |
2004.06.03 |
申请号 |
US20030249550 |
申请日期 |
2003.04.17 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORPORATION |
发明人 |
COOLBAUGH DOUGLAS D.;ESHUN EBENEZER E.;SHEPARD JOSEPH F.;STEIN KENNETH J.;VAED KUNAL |
分类号 |
H01L21/02;H01L21/314;H01L21/316;(IPC1-7):H01L29/76 |
主分类号 |
H01L21/02 |
代理机构 |
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主权项 |
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地址 |
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