| 摘要 |
PROBLEM TO BE SOLVED: To magnetically disconnect a processing space of a substrate from outside while maintaining advantages of a stage device having a non-contact guide mechanism. SOLUTION: A substrate processing device comprises a vacuum chamber 7 that serves as a processing space wherein the substrate 13 is treated by electron beams 1 or charged particle beams, the stage device 5 for supporting the substrate 13 in the vacuum chamber 7, a movable plate 9 which is connected to the stage device 5 in the vacuum chamber 7 and extended outside the vacuum chamber 7 through openings, a driver which is connected to the movable plate 9 outside the vacuum chamber 7 for moving the movable plate 9, and non-contact seals 27 and hydrostatic bearings for sealing and supporting the movable plate 9 at the openings of the vacuum chamber 7. In the device, the movable plate 9 is constituted of a magnetic material. COPYRIGHT: (C)2004,JPO |
