| 摘要 |
PROBLEM TO BE SOLVED: To provide a conveyed article detecting apparatus capable of performing detection with a high degree of accuracy without imposing a load to a detecting section. SOLUTION: There is provided the conveyed article detecting apparatus 3 for detecting a conveyed semiconductor device 1 put on a movable stage 2. In the conveyed article detecting apparatus 3 employed, there are provided a detecting section comprising an optical fiber 4 provided in the stage 2, and a control unit 6 including a light emitting element for emitting light via the optical fiber 4 and a light receiving element for receiving reflected light of the emitted light via the optical fiber. One end 4a of the optical fiber 4 is connected optically to the control section 6 with a predetermined gap between the one end and the control unit 6. COPYRIGHT: (C)2004,JPO |
