发明名称 LAYERED COMPONENTS, MATERIALS, METHODS OF PRODUCTION AND USES THEREOF
摘要 A layered component is described that includes: a substrate; a dielectric material having a plurality of pores, wherein the material is coupled to the substrate; and a diffusion blocking material coupled to the low k dielectric material, wherein the diffusion blocking material is attracted to the low k dielectric material. A layered material is also described that includes: a dielectric material having a plurality of pores, wherein each pore has a pore diameter; and a layer comprising a plurality of diffusion blocking particles, wherein the particles have a article size that is larger than the pore diameter. Methods of minimizing the diffusion of metal atoms into a material having a plurality of pores are further disclosed that include: providing a precursor material that comprises molecules having a molecule size that is larger than a pore diameter of any of the plurality of pores; providing a solvent carrier solution; combining the precursor material and the solvent carrier solution to form a diffusion blocking reactive solution; and applying the diffusion blocking reactive solution to a layer of porous material.
申请公布号 WO03103020(A3) 申请公布日期 2004.06.03
申请号 WO2003US17656 申请日期 2003.06.03
申请人 HONEYWELL INTERNATIONAL INC.;IWAMOTO, NANCY;THOMAS, MICHAEL 发明人 IWAMOTO, NANCY;THOMAS, MICHAEL
分类号 H01L21/316;H01L21/768;H01L23/532 主分类号 H01L21/316
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