发明名称 |
LAYERED COMPONENTS, MATERIALS, METHODS OF PRODUCTION AND USES THEREOF |
摘要 |
A layered component is described that includes: a substrate; a dielectric material having a plurality of pores, wherein the material is coupled to the substrate; and a diffusion blocking material coupled to the low k dielectric material, wherein the diffusion blocking material is attracted to the low k dielectric material. A layered material is also described that includes: a dielectric material having a plurality of pores, wherein each pore has a pore diameter; and a layer comprising a plurality of diffusion blocking particles, wherein the particles have a article size that is larger than the pore diameter. Methods of minimizing the diffusion of metal atoms into a material having a plurality of pores are further disclosed that include: providing a precursor material that comprises molecules having a molecule size that is larger than a pore diameter of any of the plurality of pores; providing a solvent carrier solution; combining the precursor material and the solvent carrier solution to form a diffusion blocking reactive solution; and applying the diffusion blocking reactive solution to a layer of porous material. |
申请公布号 |
WO03103020(A3) |
申请公布日期 |
2004.06.03 |
申请号 |
WO2003US17656 |
申请日期 |
2003.06.03 |
申请人 |
HONEYWELL INTERNATIONAL INC.;IWAMOTO, NANCY;THOMAS, MICHAEL |
发明人 |
IWAMOTO, NANCY;THOMAS, MICHAEL |
分类号 |
H01L21/316;H01L21/768;H01L23/532 |
主分类号 |
H01L21/316 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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