| 摘要 |
PROBLEM TO BE SOLVED: To provide an excitation type sensor which can coexist in easy handling in size and enhancing in a resonance frequency. SOLUTION: The excitation type sensor110 is mounted on a backside 114b in opposite side of a test piece profile 114a of a base 114 and has a protrusion 152 which projects in reversing orientation against a stylus tip 116a on the same axis with a stylus 116. A piezoelectric element 122 is located between the stylus 116 and the protrusion 152 and vibrates longitudinally in the axis of the stylus 116 and the protrusion 152. The piezoelectric element 122 is located in a node of vibration, the stylus tip 116a and a protrusion tip 152b are located in an antinode of vibration, so that longitudinal vibration is excited in Z-axis of the stylus 116 and the protrusion 152. COPYRIGHT: (C)2004,JPO
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