THIN FILM SEMICONDUCTOR DEVICE AND LIQUID CRYSTAL DISPLAY, AND THEIR MANUFACTURING METHODS

摘要

PROBLEM TO BE SOLVED: To improve the opening rate of a pixel of a thin film semiconductor device used as a driving substrate of an active matrix liquid crystal display. SOLUTION: A lower-side shading layer 5 is composed of a first conductive layer and at least its part is used for the gate wiring. The gate electrode G is composed of a second conductive different from the first conductive layer. The first conductive layer used for the gate wiring and the second conductive layer being as the gate electrode G are electrically connected in each pixel through a contact GCN each other. The upper-side shading layer 4 is composed of a third conductive layer kept at a constant potential. A supplementary capacitor 13 is formed over the first conductive layer, and its upper-side electrode 14 is electrically connected to a third conductive layer making up the upper-side shadow layer 4 through contacts CCN and MCN. COPYRIGHT: (C)2004,JPO